Consequently, for the same electron beam energy, the volume from which characteristic X-rays may originate is larger than the volume from which secondary and backscattered electrons, which make up the image, originate. Therefore, the spatial resolution of the X-ray map will always be worse than the resolution of the image. It is good practice to run a simulation, such as that shown in Figure 3, in advance of an EDX elemental map to give a better idea of what pixel size to use for the map (chosen based on simulated electron beam interaction volume). Such a simulation can be done using the freely available Win X-Ray software.
Quantification accuracy
Quantification using EDX is less accurate than new users typically assume. In the best-case scenario using quantification standards with a sample that is atomically flat, completely homogenous and defect-free, one might expect a quantification accuracy to ~0.1 atomic percent. In practice this is almost never the case. Standard-based analysis is time-consuming, expensive and, consequently, rarely done. The vast majority of EDX analysis quantification is standard-less quantification and significantly less accurate. Also, the sample surface is not going to be as flat or as homogenous as in the ideal case. Expectations should be set with this in mind, and one could reasonably expect accuracy within a few atomic percent on a decent-quality sample.
Sensitivity/detection limits
There is insufficient X-ray signal from elements in low concentrations to be detected using EDX analysis. This is especially true for lighter elements. Lithium, for example, can’t be detected in most EDX detectors due to the characteristic X-rays from lithium being so low energy that they are attenuated by the window in front of the EDX detector. Most detectors will have a sensitivity of ~0.1 atomic percent, so trace element analysis isn’t an option.
Materials sensitive to EDX electron beam conditions
Not all samples can withstand the beam conditions necessary for prolonged EDX analysis or, in some cases, even short EDX analysis. Specifically, polymers and biological samples tend to be challenging at best to analyze and impossible at worst. Polymer surfaces can be destroyed in seconds. This beam sensitivity coupled with the lack of spatial resolution and low X-ray yield makes this technique not recommended for polymers. Beam sensitivity is not just limited to organic samples. For example, some lithium battery materials can be very sensitive to electron beam irradiation, and even imaging in mild conditions can cause problems. If you’re unsure whether your material is suitable for EDX, please consult with CHTP staff.
Is EDX a bulk analysis or a surface analysis?
EDX is neither considered a bulk analysis nor a surface analysis owing to the size of the analysis volume. The analysis volume is too large for a surface analysis and not large enough to sample enough material to be a statistically representative bulk analysis. For compositional analyses of materials without any surface coatings, EDX can provide a quick, non-destructive analysis to give a reasonable estimate in many cases.
What if I would like to analyze a surface/coating with EDX?
Surface analysis applications of EDX are quite limited. EDX can be useful for determining the area coverage of a coating, assuming there is a sufficient X-ray signal from the coating (depending on the thickness of the coating). In some cases, the thickness of surface oxides/coatings may be estimated by acquiring EDX spectra at different electron beam accelerating voltages and comparing them with simulated spectra. In general, EDX is largely inadequate for surface analyses. The analysis volume is too large to be representative of a surface and the sensitivity is not high enough to detect monolayers/surface layers of only a few nanometers. For this kind of analysis, X-ray photoelectron spectroscopy (XPS)/auger electron spectroscopy (AES) is recommended.